Yuan Ze University - Department of Mechanical Engineering
繁
Menu
Overview
Faculty & Staff
Faculty
staff
Retired Faculty
Adjunct Faculty
Latest News
activity
Message
Admissions
Admissions
Teaching Excellence
Curriculum
Interdisciplinary Programs
Research Subjects
Development of New Energy and Power Saving Technologies
Dynamics and Reliability Analysis of Mechanical and Electronic Systems
Nano/Micro-Materials and Applications
Biomedical Optomechatronics
Automatic Control and Industry 4.0
Lab & Facilities
Lab & Facilities
Selective Laboratories
Teach laboratory
Instruments
Research Instruments
Teaching Instruments
Student Affairs
Student Affairs
Information
Portal
Library
Course Selection
E-mail
Instruments
Home
Instruments
研究儀器設備
磁控濺鍍機
磁控濺鍍機
Placement:R3007
Controller:沈炳臣
Instrument code
Brand model
Instrument function
使用電漿對靶材進行離子轟擊,將靶材表面的原子撞擊出來。這些原子以氣體分子型式發射出來,並到達所要沉積的基板上,再經過附著、吸附、表面遷徙、成核等過程之後,在基板上成長形成薄膜。
Specification
Service item
Precautions
LINK
Back to Top